Vijay Ramani

San Francisco Bay Area Contact Info
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I have 18+ years of product management experience. I enjoy designing, developing and…

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Patents

  • Methods and systems for inspection of a wafer or setting up an inspection process

    Issued USPTO 07659975

    Methods and systems for inspection of a wafer or setting up an inspection process are provided. One method for inspection of a wafer includes detecting first and second sets of defects on the wafer by performing different scans of the wafer with different focus offsets. The method also includes comparing results of the different scans for a defect of the first set and a defect of the second set that are detected at approximately the same location on the wafer. The method further includes…

    Methods and systems for inspection of a wafer or setting up an inspection process are provided. One method for inspection of a wafer includes detecting first and second sets of defects on the wafer by performing different scans of the wafer with different focus offsets. The method also includes comparing results of the different scans for a defect of the first set and a defect of the second set that are detected at approximately the same location on the wafer. The method further includes determining if the defect of the first and second sets is a defect of an underlying layer or an uppermost layer formed on the wafer based on results of the comparing step.

    See patent

Languages

  • English

    Native or bilingual proficiency

  • Korean

    Elementary proficiency

  • Mandarin

    Elementary proficiency

  • Hindi

    Professional working proficiency

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